发明名称 |
Wide range pressure control using turbo pump |
摘要 |
The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.
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申请公布号 |
US7438534(B2) |
申请公布日期 |
2008.10.21 |
申请号 |
US20050245797 |
申请日期 |
2005.10.07 |
申请人 |
EDWARDS VACUUM, INC. |
发明人 |
HOLLAND PETER JOHN;WILSON KATE;STEPHENSON DAWN |
分类号 |
F04B49/00;F04B17/00;F04B35/04 |
主分类号 |
F04B49/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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