| 摘要 |
A TOC component removing apparatus removes TOC components contained in ultrapure water or pure water. The apparatus includes a treatment tank into which the ultrapure water or the pure water is introduced, a plurality of spherical catalyst particles of which surfaces are photocatalyst, a tabular translucent holding body which holds the catalyst particles on one surface, and an ultraviolet-ray light source which is arranged near the translucent holding body and radiates ultraviolet rays with a wavelength of 254 nm.
|
