GAS LEAKAGE SENSING SYSTEM FOR GAS SUPPLY DEVICE AND METHOD FOR GAS LEAKAGE SENSING

摘要

A gas leakage sensing system for a gas supply device and a method for sensing gas leakage are provided to prevent or minimize defect generation during semiconductor manufacture by being installed on semiconductor manufacture equipment. A gas leakage sensing system(100) for a gas supply device includes a gas line(104), a light emitter(110), a fraction sensor(112), and a comparator(114). The gas line is a passage for gas supply and is partly transparent. The light emitter emits light on a transparent part of the gas line. The fraction sensor is installed below the transparent part of the gas line facing the light emitter and senses a fraction angle of the light transmitted through the transparent part of the gas line. The comparator compares a sensed fraction angle with a standard fraction angle to determine gas leak and generates an interlock signal when the gas leak is determined.