发明名称 |
Method of making and structure of multilayer laue lens for focusing hard x-rays |
摘要 |
A zone plate multilayer structure includes a substrate carrying a plurality of alternating layers respectively formed of tungsten silicide (WSi<SUB>2</SUB>) and silicon (Si). The alternating layers are sequentially deposited precisely controlling a thickness of each layer from a minimum thickness of a first deposited layer adjacent the substrate to a maximum thickness of a last deposited layer. The first minimum thickness layer has a selected thickness of less than or equal to 5 nm with the thickness of the alternating layers monotonically increasing to provide a zone plate multilayer structure having a thickness of greater than 12 mum (microns). The x-rays are diffracted in Laue transmission geometry by the specific arrangement of silicon and tungsten silicide.
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申请公布号 |
US7440546(B2) |
申请公布日期 |
2008.10.21 |
申请号 |
US20060634681 |
申请日期 |
2006.12.06 |
申请人 |
UCHICAGO ARGONNE, LLC |
发明人 |
LIU CHIAN Q.;CONLEY RAYMOND P.;MACRANDER ALBERT T.;KANG HYON CHOL;STEPHENSON G. BRIAN;MASER JORG |
分类号 |
G21K1/06 |
主分类号 |
G21K1/06 |
代理机构 |
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地址 |
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