发明名称 Polymer film and method for producing the same
摘要 A copolymer film having a decreased dielectric constant which is produced by supplying at least two organic monomers as raw materials, forming a film of a copolymer comprising a backbone based on said at least two monomers on a surface of a substrate, and heating the copolymer film at a temperature higher than a temperature at which the copolymer film is formed.
申请公布号 US7439315(B2) 申请公布日期 2008.10.21
申请号 US20050186856 申请日期 2005.07.22
申请人 NEC CORPORATION 发明人 KUNIMI NOBUTAKA;KAWAHARA JUN;NAKANO AKINORI;KINOSHITA KEIZO
分类号 C08F30/08;C08F38/02 主分类号 C08F30/08
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