| 发明名称 |
Use of partially fluorinated polymers in applications requiring transparency in the ultraviolet and vacuum ultraviolet |
| 摘要 |
Disclosed are partially fluorinated and fully fluorinated polymers that are substantially transparent to ultraviolet radiation at wavelengths from approximately 150 nanometer to 260 nanometers.
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| 申请公布号 |
US7438995(B2) |
申请公布日期 |
2008.10.21 |
| 申请号 |
US20030475245 |
申请日期 |
2003.10.16 |
| 申请人 |
E.I. DU PONT DE NEMOURS AND COMPANY |
发明人 |
FRENCH ROGER HARQUAIL;WHELAND ROBERT CLAYTON;QIU WEIMING |
| 分类号 |
G03F7/20;C08F12/20;C08F14/18;C08F114/18;C08J7/00;C09J127/12;G02B1/04;G02B5/00;G03C5/04;G03F1/14;G03F7/004;H01L21/027 |
主分类号 |
G03F7/20 |
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