ROTARY TOOL FOR WORKING SOFT MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a rotary tool for working soft material capable of extending its use life by preventing falling of a hard film such as a diamond film etc. due to intrusion of a slurry liquid part and never making a scratch on a semiconductor wafer etc. worked and adjusted by a working material such as a pad etc.

SOLUTION: This rotary tool for soft material working to move the working material made of a soft material and work this working material is constituted so that a cutting blade protruded part 14 is formed to be projected on a surface 11A of a substrate 11 opposed to the working material, a gaseous phase synthetic diamond film 17 is formed on a point surface 15 of this cutting blade protruded part 14 and a surface of this gaseous phase synthetic diamond film 17 is hydrogen-termination-treated.

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