发明名称 NOZZLE MEMBER AND SUBSTRATE HEAT TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To make a gas (fluid) jet out at uniform temperature in the longitudinal direction of a nozzle. SOLUTION: A jet nozzle 20 is slender and has a hollow nozzle body 40. The body 40 has a plurality of nozzle orifices 42, extending in the longitudinal direction and an air inlet 44 of heated air. Inside the nozzle body 40, a first cylindrical body 45, that extends in the longitudinal direction and is made of a material, having thermal conductivity higher than that of the nozzle body 40, is assembled and is heated at temperature equal to that of the air heated by the heated air. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008251863(A) 申请公布日期 2008.10.16
申请号 JP20070091774 申请日期 2007.03.30
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 NAKANE SHINGO
分类号 H01L21/027 主分类号 H01L21/027
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