| 摘要 |
A power sensor comprises a substrate, an insulating membrane associated with the substrate, and an electro-thermal transducer partially supported by the insulating membrane. The electro-thermal transducer includes an impedance matched load spaced from the substrate by the insulating membrane, and a thermopile partially spaced from the substrate by the insulating membrane and partially arranged on the substrate, the thermopile being adapted to generate, a voltage in response to heat generated in the impedance matched load. An electrically conductive member connected with the impedance matched load to guide electromagnetic signals to the electro-thermal transducer.
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