| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric element wherein leakage current and operation failure are reduced, and to provide a manufacturing method therefor. <P>SOLUTION: The piezoelectric element 100 is provided with a substrate 10, a lower electrode 20 formed on the substrate 10, a piezoelectric substance layer 30 formed on the lower electrode 20, an upper electrode 40 formed on the piezoelectric substance layer 30, and a protective layer 60 that is formed, covering the side of the piezoelectric substance layer 30. The protective layer 60 is made of a polymer material. <P>COPYRIGHT: (C)2009,JPO&INPIT |
