| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of hydrogen separation membrane capable of forming a silica separation membrane having high hydrogen selective permeability by a CVD (chemical vapor deposition) method. <P>SOLUTION: The manufacturing method of hydrogen separation membrane includes steps of: supplying a silica source mixed gas of a silica forming substance evaporated on one surface side of a porous substrate and an inert gas; supplying the inert gas being reactive species to the other surface side of the porous substrate to perform opposite diffusion for a prescribed time; thereafter performing one-side supply of the silica source mixed gas; performing such opposite diffusion and one-side supply at several times to deposit silica in pores in the vicinity of the surface of the porous substrate by chemical vapor deposition; and forming a silica membrane to manufacture the hydrogen separation membrane. The one-side supply of the silica source mixed gas is performed by vacuuming and sucking the inert gas-supplied surface side for a prescribed time in a state of continuously supplying the mixed gas or in a state of remaining the mixed gas in a reactor. <P>COPYRIGHT: (C)2009,JPO&INPIT |
