| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor element capable of enhancing the sensitivity of an element, even when a base body is compactified. <P>SOLUTION: The angular velocity sensor element includes a fixed part 20 fixed on an upper face of a sensor element support part 51 of a case 4, an upper detecting arm 21 and a lower detecting arm 22 connected to both sides of the fixed part 20, and extended along a face in parallel to an upper face of the sensor element support part 51, and a pair of upper vibration arms 23 connected to the fixed part 20 with the upper detecting arm 21 therebetween, and extended along an extension direction of the upper detecting arm 21. The upper detecting arm 21 is provided protrudedly with a pair of piezoelectric elements 21A, 21B, the lower detecting arm 22 has protrudedly a pair of piezoelectric elements 22A, 22B, and the upper vibration arms 23 has protrudedly a pair of piezoelectric elements 23A, 23B. <P>COPYRIGHT: (C)2009,JPO&INPIT |
