| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate treatment apparatus capable of excellently separately collecting a plurality of kinds of treatment liquids different from one another in applying predetermined wet treatment to the substrate by sequentially supplying the plurality of kinds of treatment liquids. SOLUTION: The plurality of kinds of treatment liquids different from one another are sequentially supplied to a gap space S1 for disposing the substrate W to apply wet treatment to the substrate W for each treatment liquid. Treatment liquids are sequentially discharged from a communicating portion 124, and in this case, a treatment unit 1 and a liquid collecting unit 2 relatively move, so that liquid collecting tanks 21-24 are selectively disposed at collecting positions each corresponding to the kind of each of the treatment liquids to be discharged from the communicating portion 124. Here, the liquid collecting unit 2 is disposed on the lower side of the treatment unit 1 separately from the treatment unit 1, and the treatment liquids are discharged from the communicating portion 124 of the treatment unit 1 downward in a vertical direction to the lower side of the gap space S1. COPYRIGHT: (C)2009,JPO&INPIT
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