| 摘要 |
PROBLEM TO BE SOLVED: To suitably prevent generation of foreign matters and handling damage in substrate inspection when a glass substrate for a magnetic disk is manufactured. SOLUTION: The manufacturing method of the glass substrate for the magnetic disk includes a substrate preparing process for preparing a disk-shaped glass substrate 10, a polishing process for polishing the glass substrate 10 and a substrate inspection process for inspecting the polished glass substrate 10. Inspection is performed using a holding device 100 holding the glass substrate 10 in the substrate inspection process and the holding device 100 rotates the glass substrate 10 to be inspected around an axis passing through a center of a main surface of the glass substrate 10 to be inspected and perpendicular to the main surface. COPYRIGHT: (C)2009,JPO&INPIT
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