| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for depositing a thin film on a sheet, and a manufacturing method of a sheet with a thin film capable of realizing minimum heat damage caused in a thin film depositing process of an electric-insulating sheet, in particular, a plastic film, and realizing minimum charge remaining on a thin film non-deposition surface which may cause wrinkles or blocking of a film. SOLUTION: In the manufacturing method of the sheet with the thin film in which the thin film is formed by depositing fine particles flying from a fine particle generation source on an electric insulating sheet to be conveyed along a circumferential surface of a rotating cylindrical sheet guide surface, the thin film is formed on a thin film deposition surface of the sheet on the sheet guide surface after charging the sheet by mainly guiding the charged particles of either polarity out of the charged particles fed from a plasma generation source. COPYRIGHT: (C)2009,JPO&INPIT
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