| 摘要 |
According to various aspects, exemplary embodiments are provided of thermopneumatic capillary micropumps and manufacturing methods thereof. In one exemplary embodiment, a thermopneumatic capillary micropump generally includes a lower substrate having a pump-entrance for injecting fluids and a pump-exit for exhausting the fluids. The micropump also includes one or more micro-heaters for generating heat and electrodes for applying voltage to the micro-heaters. One or more air chambers substantially cover the micro-heaters. A pump chamber unit, which is capable of being filled up with the fluids, is coupled to the air chambers, the pump-entrance, and the pump-exit. An airing channel is coupled to the air chambers for helping maintain the pressure of the air in the air chambers at about the same level. An oxide layer is deposited on an upper substrate of the micropump. The upper and lower substrates are thermopneumatically coupled to each other.
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