| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate cleaning method which prevents the generation of defects on the substrate and also improves the efficiency of cleaning work by preventing each substrate from sticking together in a storage cassette when pulling up the storage cassette from a cleaning liquid. SOLUTION: An auxiliary member 10 has a supporting part 10c for supporting each stick substrate 1, a spacer part 10b of a concave shape for controlling gaps between the respective stick substrates 1 vicinally positioned, and a water-running passage 10e which is made to pass through in the parallel direction with the pulling-up direction of each stick substrate 1. The auxiliary member 10 is arranged in the middle of both end parts of each stick substrate 1, and the cleaning liquid near the auxiliary member 10 is made to flow down through the water-running passage 10e while controlling the gaps between the respective stick substrate 1 by the auxiliary member 10 so that the storage cassette 2 is pulled up from the cleaning liquid. COPYRIGHT: (C)2009,JPO&INPIT
|
