申请人 |
MATTSON TECHNOLOGY, INC.;NENYEI, ZSOLT;TIMANS, PAUL, JANIS;LERCH, WILFRIED;NIESS, JUERGEN;FALTER, MANFRED;O'CARROLL, CONOR, PATRICK;CARDEMA, RUDY;FIDELMAN, IGOR;TAY, SING-PIN;HU, YAO ZHI;DEVINE, DANIEL, J.;SCHMID, PATRICK |
发明人 |
NENYEI, ZSOLT;TIMANS, PAUL, JANIS;LERCH, WILFRIED;NIESS, JUERGEN;FALTER, MANFRED;O'CARROLL, CONOR, PATRICK;CARDEMA, RUDY;FIDELMAN, IGOR;TAY, SING-PIN;HU, YAO ZHI;DEVINE, DANIEL, J.;SCHMID, PATRICK |