| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and apparatus for producing a functional membrane with a high aspect ratio structure which have characteristics suitable for mass-production, such as low production cost and a high yield. <P>SOLUTION: A functional membrane is produced through the taking out step 30 for taking stampers 13, 13... each having a concave array reflecting a convex array out of a stocker 20, the injecting step 40 for injecting a resin polymer solution 16 into the concave array of the taken out stamper 13 and for producing a convex array using the resin polymer solution 16, the drying step 50 for drying and curing the resin polymer solution 16 formed into the convex array, the peeling step for peeling off a solid matter of the cured resin polymer from the stamper 13, and the returning step 70 for returning the stamper 13 after the peeling step to the stocker 20. <P>COPYRIGHT: (C)2009,JPO&INPIT |
