FUNCTIONAL LIQUID SUPPLY DEVICE AND DROPLET DISCHARGE DEVICE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a functional liquid supply device in which the stoppage of drawing processing by a functional liquid droplet discharge head in the exchange of a main tank is not required.

SOLUTION: The functional supply device is provided with a plurality of subtanks 121, a single tank unit 122 for replenishing the functional liquid respectively to the plurality of the subtanks 121, an upstream side function liquid flow passage 126 connected to the tank unit 122 on the upstream side and connected to each subtank on the lower stream side and a plurality of third on-off valves 139 for supplying the functional liquid pressurized and supplied from the tank unit 122 to each subtank 121 by the on-off action. The tank unit 122 has a pair of main tanks 181, gaseous nitrogen supply equipment 85 connected to a pair of the main tanks 181 and a switching mechanism 183 for alternately changing the pressure supply of the functional liquid from a pair of the main tanks 181.

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