| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraviolet resistant material which can be used under the environment in which ultraviolet rays are irradiated, to provide a sealing member using the same, to provide a cushioning member, to provide a light shielding member, to provide a light source device, and to provide a processing apparatus. SOLUTION: In an air-tight container (44) of an excimer lamp in which xenon gas for excimer discharge is enclosed and a discharge space (45) is formed, a light transmission window (43) is installed through the sealing member (48) formed of the ultraviolet resistant material composed of a clay thin film, and the cushioning member (49). COPYRIGHT: (C)2009,JPO&INPIT |
