| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a substrate heat treatment apparatus in the height direction. SOLUTION: The substrate heat treatment apparatus 1 has a casing 10 in a double-wall structure that surrounds a hot plate 16. A discharge nozzle 20 for discharging heated air into space in the casing 10 is integrally assembled to a top wall 14 in the casing 10. On the lower surface of the top wall 14, a guide plate 26 is provided which allows the heated air to flow along the top wall 14 by guiding the heated air discharged from the discharge nozzle 20. COPYRIGHT: (C)2009,JPO&INPIT
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