| 摘要 |
PROBLEM TO BE SOLVED: To provide a humidity sensor capable of detecting highly precisely humidity, capable of shortening film formation time, since organic molecules are aggregated and organized by an electrostatic force of a cationic polymer and an anionic polymer, having high film strength and high durability, capable of dispensing with a large-scaled reactor or the like because a film is formed by a simple operation, capable of controlling easily a material in a molecule level, and capable attaining excellent quality stability and excellent productivity, as to the humidity sensor using a change of natural frequency of a quartz oscillator or the like, a change of resonance frequency or the like. SOLUTION: This humidity sensor of the present invention is provided with a substrate 2, and an alternate laminate part 6 laminated with alternately with a cationic polymer film 4 and an anionic polymer film 5 with one or a plurality thereof, and formed on the substrate. COPYRIGHT: (C)2009,JPO&INPIT
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