| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring method and a shape measuring apparatus, capable of precisely measuring a surface shape in order to enable a process to be completed in a short time. SOLUTION: In the shape measuring method, a contact body for contacting with a processed surface of an object to be measured whose shape should be measured, by a prescribed contact force, a holding section for holding the contact body reciprocatably to the processed surface and a stage for mounting the object to be measured are relatively moved along a prescribed trajectory being previously determined, and a misalignment between the prescribed trajectory and the processed surface shape of the object to be measured is detected based on the presence or absence of a variation equal to or more than a prescribed threshold in the movement amount of the contact body to the holding section. COPYRIGHT: (C)2009,JPO&INPIT
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