| 摘要 |
A scribing unit is provided to perform a scribing process in which unit substrate are separated from a panel where the unit substrates are formed. The scribing unit includes a megasonic vibrator, which applies a megasonic vibration to a wheel to make fracture surfaces of the unit substrates smooth. Therefore, it is possible to omit a process of grinding the edges of the fracture surface of the unit substrates before cleaning the separated unit substrates.
|
