发明名称 SELF-INITIATED ALKALINE METAL ION FREE ELECTROLESS DEPOSITION COMPOSITION FOR THIN CO-BASED AND NI-BASED ALLOYS
摘要 A method and composition for electrolessly depositing a layer of a metal alloy onto a surface of a metal substrate in manufacture of microelectronic devices. The composition comprises a source of metal deposition ions, a borane-based reducing agent, and a two-component stabilizer, wherein the first stabilizer component is a source of hypophosphite and the second stabilizer component is a molybdenum (VI) compound.
申请公布号 US2008254205(A1) 申请公布日期 2008.10.16
申请号 US20070735202 申请日期 2007.04.13
申请人 ENTHONE INC. 发明人 PETROV NICOLAI;VALVERDE CHARLES;CHEN QINGYUN;HURTUBISE RICHARD
分类号 B05D5/12;C09D5/00 主分类号 B05D5/12
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