| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric capacitor which can be stably produced and can suppress the diffusion of hydrogen atoms, from a mounting terminal to a dielectric layer during usage. SOLUTION: An electrode 12, a dielectric layer 13, and the other electrode 14 are laminated, in this order, on a substrate 11, a first opening 15b for partially exposing a top surface 14T of the other electrode is formed on a first insulating layer 15 covering the other electrode, and a second opening 16b for partially exposing the top surface of the other electrode is formed on a second insulating layer 16 that covers the first insulating layer. The second opening has an opening dimension which is larger than that of the first opening, and the surface of a recessed portion H is covered with a conductive hydrogen barrier layer 17. Thus, more sure suppression of the diffusion of hydrogen atoms to the dielectric layer can be made, thereby suppressing degradation of the characteristics of the dielectric capacitor, for example, leakage current characteristics and dielectric characteristics. COPYRIGHT: (C)2009,JPO&INPIT
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