| 摘要 |
PROBLEM TO BE SOLVED: To detect highly accurately only an essential defect existing in a specimen without detecting wrongly noise superimposed on specimen image data as a defect. SOLUTION: This device is equipped with a specimen stage 101, an illumination optical part 102 for irradiating the specimen on the specimen stage 101 with light, an imaging camera 103 for imaging reflected light from the specimen, a frame memory 110 for storing imaged image data, and a computer 111 for applying image processing to the image data. The computer 111 is equipped with an image processing data acquisition part for acquiring the first image processing data by applying contour emphasizing processing to the specimen image data and the second image processing data by applying low-pass filter processing thereto, a differential image data calculation part for acquiring differential image data between the first image processing data and the second image processing data, a high-pass filter processing part for applying high-pass filter processing to the differential image data, a dynamic threshold comparison part, and a defect existence determination part. COPYRIGHT: (C)2009,JPO&INPIT
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