| 摘要 |
PROBLEM TO BE SOLVED: To detect with high accuracy defects in a recessed part on a semiconductor substrate. SOLUTION: In this defect inspection device 1, an inspection domain on the substrate 9 is irradiated with polarized light by the first illumination part 3, and reflected light from the inspection domain is received by the first spectroscope 43 of the first light-receiving part 4, and a phase difference spectrum, showing the reflection characteristic of the reflected light (namely, a phase difference between a p-polarized component and an s-polarized component in each wavelength) is transmitted to an inspection part of a control part 7. In the control part 7, an inspection wavelength determined, based on theoretical calculation corresponding to the kind of a defect which is an inspection object and a threshold are stored beforehand in the storage part, and an assembly of a plurality of defects in the recessed part formed on the inspection domain on the substrate is detected, based on the threshold and the phase difference in an inspection wavelength determined from the phase difference spectrum by the inspection part. Thus, fine defects in the recessed part on the substrate 9, which is difficult to be detected by an ordinary defect inspection device for performing inspection, by irradiating the substrate with light can be detected with high accuracy. COPYRIGHT: (C)2009,JPO&INPIT
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