| 摘要 |
PROBLEM TO BE SOLVED: To provide a furnace internal pressure control method of a heating furnace capable of enhancing operational safety of the furnace, while stabilizing quality of a processing object by stabilizing furnace internal pressure. SOLUTION: An exhaust system of the heating furnace is provided with an ejector 11 and an exhaust side mass flow controller 13 adjusting a flow rate of driving gas supplied to this ejector 11. The heating furnace is provided with a pressure gauge 9 detecting the furnace internal pressure by communicating with its inside, and the furnace internal pressure is maintained in a predetermined value by controlling the exhaust side mass flow controller 13 by using a measured value of this pressure gauge 9. COPYRIGHT: (C)2009,JPO&INPIT
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