| 摘要 |
PROBLEM TO BE SOLVED: To reliably suck and hold sheet-like workpieces of various sizes. SOLUTION: A movable stage 12a comprises a stage body 58, a suction plate 60, and claw members 61a-61d. In the suction plate 60, a large number of suction holes 66, 67 are formed in the range of first and second sections 60a, 60b corresponding to each size of a substrate. First and second air chambers 71, 72 are formed in the stage body 58. The first and second air chambers 71, 72 are communicated with the first and second suction holes 66, 67, and a part thereof are located in an alternate array. When a gas suction unit 81 is operated, the inside of the first and second suction parts 71, 72 is sucked, and the substrate is sucked to the suction holes 66, 67 and tightly attached thereto. COPYRIGHT: (C)2009,JPO&INPIT
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