DROPLET DISCHARGE DEVICE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To suppress the waving of the liquid surface of a functional liquid in a subtank when a functional liquid droplet discharge head is moved. SOLUTION: The droplet discharge device 1 is provided with the functional liquid droplet discharge head 17 of an inkjet system for carrying out drawing by discharging the functional liquid droplet to a workpiece, a subtank 121 for supplying the functional liquid replenished from a main tank through a functional liquid flow passage to the functional liquid droplet discharge head 17 and having a gas space in the upper part and a moving means 12 for mounting the subtank 121 and the functional liquid droplet discharge head 17 and moving the subtank 121 and the functional liquid droplet discharge head 17 in one direction. The subtank 121 is formed to have a thin type rectangular shape and is mounted on the moving means 12 so that the thickness direction to become thin type nearly matches the moving direction. COPYRIGHT: (C)2009,JPO&INPIT