发明名称 INSPECTION SYSTEM AND METHOD
摘要 <p>A method and system for illuminating a target such as a device under test. Light is projected from a light source to a light controller having a plurality of pixels. The pixels are controlled to establish first and second illumination characteristics and, the target is illuminated with the first and second illumination characteristics from the light controller.</p>
申请公布号 WO2008124397(A1) 申请公布日期 2008.10.16
申请号 WO2008US59031 申请日期 2008.04.01
申请人 FISHBAINE, DAVID 发明人 FISHBAINE, DAVID
分类号 H01S3/10 主分类号 H01S3/10
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