PIPE CLEANING UNIT AND SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT

摘要

A pipe cleaning unit and semiconductor device manufacturing equipment having the same are provided to reduce a time required for disjointing and reassembling pipes when gas supply pipes and gas exhaust pipes are cleaned by cleaning an inside of the pipe using supersonic waves. A cleaning liquid storing unit(410) is filled with a regular cleaning liquid. An end of a first pipe(461) is coupled to a side of a gas pipe. The other end of the first pipe is communicated with the cleaning liquid storing unit. An end of a second pipe(462) is coupled to the other side of the gas pipe. The other end of the second pipe is coupled to the cleaning liquid storing unit. A supersonic waves oscillator(420) oscillates supersonic waves to the cleaning liquid storing unit. A circular pump(430) is installed on the second pipe to circulate the cleaning liquid. An exhaust pipe is connected to the cleaning liquid storing unit to exhaust the cleaning liquid. The circular pump and the supersonic waves oscillator are electrically connected to a control unit(470). The control unit controls an operation of the circular pump and a supersonic waves oscillation level of the supersonic waves oscillator.