发明名称 IMPEDANCE MATCHING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To solve the problem, wherein a movable part 30 on a variable capacitor comprises a bolt part 31 and a nut part 32, but repeated operation only in a partial range on the movable part 30 gives rise to a phenomenon of depleted grease to cause screw threads on the bolt part 31 and the nut part 32 to be worn and deformed, thereby smooth movement being prevented. <P>SOLUTION: A decision criterion is set up to decide whether or not re-greasing is required for each variable capacitor. A control section 70 decides whether or not re-greasing is performed on the basis of the decision criterion, and re-greasing is performed if the requirements are satisfied. Information output from an input terminal information detection section 40, a first position detection section 61 and the like is used for making decision. Capability of automatic re-greasing operation eliminates the need for stopping a high-frequency power supply unit. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008251976(A) 申请公布日期 2008.10.16
申请号 JP20070093949 申请日期 2007.03.30
申请人 DAIHEN CORP 发明人 NEGI SHINICHI;OMAE SHUJI
分类号 H01L21/3065;H03H7/40 主分类号 H01L21/3065
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