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经营范围
发明名称
WAFER PROBER
摘要
申请公布号
JPS5240075(A)
申请公布日期
1977.03.28
申请号
JP19750116111
申请日期
1975.09.26
申请人
SUWA SEIKOSHA KK
发明人
KITA KATSUHIKO
分类号
H01L21/66
主分类号
H01L21/66
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