| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor wafer transfer device which puts a semiconductor wafer having undergone a low-temperature inspection, back to a temperature state for preventing dew condensation of the wafer in a short period of time, and enables supply of the next semiconductor wafer for a smooth low-temperature inspection even if a low-temperature inspection time is reduced. SOLUTION: The wafer transfer device 17 includes an arm storage chamber 17E having a gate 17F through which a transfer arm 17A comes in and out. The arm storage chamber 17E is provided with a gas supply means 23 having gas jet outlets 23A that supply dry air from different locations and a third pipeline 23G. Dry air is supplied from the gas jet outlet 23A toward a semiconductor wafer W that is transferred by the transfer arm 17A into the arm storage chamber 17E. COPYRIGHT: (C)2009,JPO&INPIT |
