| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film capacitor capable of improving uniformity in electrostatic capacity while maintaining high electrostatic capacity. SOLUTION: In the thin-film capacitor 1, a lower electrode serving also as a layer 100 for forming a trench where a trench pattern is formed, a dielectric film 16 provided to cover the lower electrode, and an upper electrode 17 are laminated on the upper, entire surface of the substrate successively. In the trench pattern, a first pattern P1 and a second pattern P2 are placed side by side separately. In the first pattern P1, a plurality of projections 101 are erected at a prescribed interval. In the second pattern P2, a plurality of recesses 102 are provided at a prescribed interval. Trenches are demarcated by the outer wall of each projection 101 and the inner wall of each recess 102. COPYRIGHT: (C)2009,JPO&INPIT
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