SURFACE EMISSION LASER ELEMENT AND ITS FABRICATION PROCESS

摘要

PROBLEM TO BE SOLVED: To obtain a dielectric multilayer film mirror having a desired reflectivity as a resonator and to attain desired laser output characteristics. SOLUTION: The surface emission laser element 100 has an active layer 4 and an upper DBR mirror 7 as a dielectric multilayer film mirror 7 which are laminated on a substrate 1 wherein the upper DBR mirror 7 has a surface roughness exhibiting a predetermined reflectivity for a laser beam emitted from the surface emission laser element 100 at least on one interface in a dielectric multilayer film constituting the upper DBR mirror. COPYRIGHT: (C)2009,JPO&INPIT