摘要 |
PROBLEM TO BE SOLVED: To provide an electron microscope capable of always positioning a sample in a visual field of a camera, and of preventing the number of installation of various types of apparatuses in a sample chamber from being restricted by the camera. SOLUTION: This electron microscope is composed by supporting the camera 4 to a sample holding means 9 of a sample fine-movement device 3. Since the camera 4 is moved in conjunction with the movement of a sample 8 by composing the electron microscope like that, the sample 8 is prevented from deviating from the visual field of the camera 4 or being interrupted by various types of apparatuses 6 installed around it. The number of installation of the various types of apparatuses 6 that has been restricted can be increased by installing the camera 4 on a wall of the sample chamber 1. COPYRIGHT: (C)2009,JPO&INPIT
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