发明名称 ELECTRON MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide an electron microscope capable of always positioning a sample in a visual field of a camera, and of preventing the number of installation of various types of apparatuses in a sample chamber from being restricted by the camera. SOLUTION: This electron microscope is composed by supporting the camera 4 to a sample holding means 9 of a sample fine-movement device 3. Since the camera 4 is moved in conjunction with the movement of a sample 8 by composing the electron microscope like that, the sample 8 is prevented from deviating from the visual field of the camera 4 or being interrupted by various types of apparatuses 6 installed around it. The number of installation of the various types of apparatuses 6 that has been restricted can be increased by installing the camera 4 on a wall of the sample chamber 1. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008251407(A) 申请公布日期 2008.10.16
申请号 JP20070092932 申请日期 2007.03.30
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 ASANO KAZUYA;TANAKA RYUICHI
分类号 H01J37/20;H01J37/28 主分类号 H01J37/20
代理机构 代理人
主权项
地址