| 摘要 |
A mass flow device comprises an inlet and an outlet; a bypass and a laminar flow element disposed within the bypass. The device also includes a sensor constructed so as to provide an output signal representative of the flow rate through the mass flow device, the sensor including a tube in fluid communication with the inlet and the laminar flow element at an upstream connection location, and the outlet and the laminar flow element at a downstream connection location. A flow equalizer is disposed between the inlet and the upstream connection location, wherein the flow equalizer includes a porous medium constructed with an interconnected porosity so as to greatly reduce the flow disturbance to the sensor with an approximate equalized flow pattern exiting the equalizer.
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