发明名称 APPARATUS AND METHOD FOR ELECTRONIC FUSE WITH IMPROVED ESD TOLERANCE
摘要 Method of making an electronic fuse blow resistor structure. In one embodiment, the method includes forming an insulator film, depositing a conductor on the insulator film, and after the depositing, etching the conductor to form a plurality of spaced apart non-conductive regions and a plurality of spaced-apart conductive regions. In another embodiment, the method includes forming the insulator film, forming a conductive sheet, and sub-dividing the conductive sheet into the plurality of conductive regions.
申请公布号 US2008254609(A1) 申请公布日期 2008.10.16
申请号 US20070871713 申请日期 2007.10.12
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 VOLDMAN STEVEN H.
分类号 H01L21/44;H01L21/82;H01L23/525;H01L27/02;H01L29/00 主分类号 H01L21/44
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