| 摘要 |
PROBLEM TO BE SOLVED: To provide an MEMS electrostatic type inkjet printing head wherein an electrostatic thin membrane and a driver electrode are fabricated on separate wafers prior to bonding the wafers together in the inkjet printing head. SOLUTION: The MEMS type inkjet printing head is provided with a driver component 110, an MEMS component 112 which is fabricated separately from the driver component 110, including an aperture-free fluid thin membrane, a bonding feature 332 which operatively joins the driver component 110 and the MEMS component 112, and a nozzle plate 114 attached to the MEMS component 112. COPYRIGHT: (C)2009,JPO&INPIT |
