| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly smooth gas barrier film excellent in surface smoothness, gas barrier properties and adhesion, and its manufacturing method. SOLUTION: The highly smooth gas barrier film is constituted by laminating a highly smooth layer, an intermediate layer and a gas barrier layer on a film base material in this order. The intermediate layer is formed by producing a plasma forming gas in the periphery of the film base material by impressing high frequency power to the film base material to form plasma and laminated by sputtering a target material while impressing negative DC high voltage to the film base material. COPYRIGHT: (C)2009,JPO&INPIT
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