SUBTANK UNIT AND DROPLET DISCHARGE DEVICE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a subtank unit capable of suppressing the coagulation of a functional liquid in a tank body. SOLUTION: The subtank unit 121 for receiving the replenishment of the functional liquid from the main tank through an upstream side functional liquid flow passage 126 and supplying the functional liquid to a functional liquid droplet discharge head 17 by an inkjet system through a lower side functional liquid flow passage 127 is provided with a subtank body 171 formed rectangular in the planar view, a flow-in flow passage 151 arranged in the lower end part of the subtank body 171 and connected to the upstream side functional liquid flow passage 126 and a flow-out flow passage 152 arranged in the lower end part of the subtank body 171 and connected to the lower stream side functional liquid flow passage 127. The flow-in flow passage 151 and the flow-out flow passage 152 are arranged to be separated from each other in the longitudinal direction of the subtank body 171. COPYRIGHT: (C)2009,JPO&INPIT