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发明名称
DIELECTRIC APPARATUS AND ASSOCIATED METHODS
摘要
In an embodiment of the invention, an amorphous phase dielectric material is selectively formed over a substrate. The amorphous phase dielectric material is then converted into a crystalline phase dielectric material.
申请公布号
US2008254204(A1)
申请公布日期
2008.10.16
申请号
US20070735607
申请日期
2007.04.16
申请人
INFINEON TECHNOLOGIES AG
发明人
STAPELMANN CHRIS;JASCHKE GERT;TILKE ARMIN
分类号
B05D5/12
主分类号
B05D5/12
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代理人
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