发明名称 Structure of semiconductor chip and package structure having semiconductor chip embedded therein
摘要 A semiconductor chip is disclosed, which comprises a chip having an active surface; plural electrode pads disposed on the active surface of the chip; a first passivation layer disposed on the chip, which has openings corresponding to the electrode pads to expose the electrode pads, wherein the first passivation layer is made of a material having high alkali resistance and low coefficient of elasticity; and plural metal bumps disposed in the openings of the first passivation layer. Therefore, as forming the metal bumps by a chemical deposition technique, the damage to the passivation layer can be prevented. Besides, as the semiconductor chip is embedded in a package structure, the problem of delamination occurred due to the mismatch in the coefficients of thermal expansion of the semiconductor chip and the dielectric layers can be avoided. Accordingly, the yield of the package structure having the semiconductor chip embedded therein can be improved.
申请公布号 US2008251915(A1) 申请公布日期 2008.10.16
申请号 US20080081319 申请日期 2008.04.15
申请人 PHOENIX PRECISION TECHNOLOGY CORPORATION 发明人 HSU SHIH-PING;CHEN SHANG-WEI;CHIA KAN-JUNG
分类号 H01L23/498 主分类号 H01L23/498
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