| 摘要 |
A low-stress hermetic die attach apparatus is disclosed. An example apparatus includes a hermetic package, a device disposed within the hermetic package, and one or more elongated structures greater than 2 thousandths of an inch (mils) in length connected to the package at one end and to the device at the other end. In some embodiments, the apparatus includes elongated structures at least 30 mils long or at least 100 mils long and the device includes a microelectromechanical system (MEMS) die that includes accelerometer or gyro components. In some embodiments, the elongated structures include a column or a pin made of an alloy material such as Kovar. In one embodiment, the Kovar pin is gold plated, attached to the package with a high temperature solder, and attached to the die using gold stud bumps.
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