| 摘要 |
A mover ( 344 ) that moves a stage ( 238 ) along a first axis and along a second axis includes a magnetic component ( 354 ), a conductor component ( 356 ), and a control system ( 324 ). The magnetic component ( 354 ) includes one or more magnets ( 354 D) that are surrounded by a magnetic field. The conductor component ( 356 ) is positioned near the magnetic component ( 354 ). Further, the conductor component ( 356 ) interacts with the magnetic component ( 354 ) when current is directed to the conductor component ( 356 ). The control system ( 224 ) directs current to the conductor component ( 356 ) to generate a controllable force along the first axis and a controllable force along the second axis. With this design, the same mover ( 344 ) can be used to move the stage ( 238 ) along two degrees of freedom ("DOF"). Further, the conductor component ( 356 ) including a first phase coil ( 364 A) and a second phase coil ( 364 B) that partly overlaps the first phase coil ( 364 A). With this design, the size and efficiency of the mover ( 334 ) is significantly improved. As a result thereof, the overall footprint of the mover ( 344 ) can be reduced and the heat generated by the mover ( 344 ) is minimized.
|
