Abtastbelichtungsverfahren und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben,申请号DE19966037666-传众专利搜索

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发明名称	Abtastbelichtungsverfahren und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben
摘要
申请公布号	DE69637666(D1)	申请公布日期	2008.10.16
申请号	DE19966037666	申请日期	1996.07.05
申请人	CANON K.K.	发明人	KANDA, TSUNEO;YAMADA, YUICHI;UZAWA, SHIGEYUKI
分类号	G03F7/20;H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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